A 2 micron high performance bipolar 64K ECL static RAM technology with 200 square microns contactless memory cell

Small semiconductor memories with READ/ WRITE times of less than 15 ns have typically been bipolar ECL devices. The densest such chip possible with a state-of-the art process such as 2 micron Isoplanar has been a 16K ECL RAM with a cell size of 600 to 800 square microns (Ref. 1). In order to make a practical 64K ECL RAM with 2 micron layout rules, cell size has to be less than 200 square microns. This new technology has been developed which meets the memory cell size requirement while maintaining performance.