Performance and structures of scaled-down bipolar devices merged with CMOSFETs

Fabricating BiCMOS test samples, performance and structures of 2 µm and scaled BiCMOS are evaluated. The developed BiCMOS processes realize almost the same device characteristics of bipolar and CMOS LSIs fabricated with the same lithographic technology. The intrinsic delays of BiCMOS and CMOS 2-NAND circuits are 0.5 ns and 0.4 ns respectively. The delay times are comparable with the bipolar ECL circuits. The BiCMOS technology makes it possible to fabricate high-speed, low-power dissipation, high-packing density LSIs by sharing the roles among them.