DocumentCode

3556407

Title

Thick selective tungsten for VLSI: Selectivity enhancement considerations

Author

Blewer, R.S. ; Wells, V.A.

Author_Institution

Sandia National Laboratories, Albuquerque, New Mexico

Volume

30

fYear

1984

fDate

1984

Firstpage

852

Lastpage

853

Keywords

Electrons; Geometry; Hydrogen; Laboratories; Microelectronics; Rough surfaces; Silicides; Silicon; Tungsten; Very large scale integration;

fLanguage

English

Publisher

ieee

Conference_Titel

Electron Devices Meeting, 1984 International

Type

conf

DOI

10.1109/IEDM.1984.190861

Filename

1484632