DocumentCode
3556415
Title
Modification of silicon electronic band structure using submicron period gate electrodes
Author
Warren, A.C. ; Antoniadis, D.A. ; Smith, Henry I. ; Melngailis, J.
Author_Institution
Massachusetts Institute of Technology, Cambridge, Massachusetts
Volume
30
fYear
1984
fDate
1984
Firstpage
866
Lastpage
867
Keywords
Aluminum; Electrodes; Gratings; MOSFET circuits; Periodic structures; Silicon; Transconductance; Tungsten; Voltage; X-ray lithography;
fLanguage
English
Publisher
ieee
Conference_Titel
Electron Devices Meeting, 1984 International
Type
conf
DOI
10.1109/IEDM.1984.190869
Filename
1484640
Link To Document