DocumentCode :
3556416
Title :
A Si permeable base transistor by metal/Semiconductor hetero-epitaxy
Author :
Ishibashi, Kouichirou ; Furukawa, Seijiro
Author_Institution :
Tokyo Institute of Technology, Tokyo, Japan
Volume :
30
fYear :
1984
fDate :
1984
Firstpage :
868
Lastpage :
870
Keywords :
Etching; Oxidation; Scattering; Silicides; Silicon compounds;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Electron Devices Meeting, 1984 International
Type :
conf
DOI :
10.1109/IEDM.1984.190870
Filename :
1484641
Link To Document :
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