• DocumentCode
    3556464
  • Title

    Integrated Zinc oxide-on-silicon tactile-sensor array

  • Author

    Polla, D.L. ; Chang, W.T. ; Muller, R.S. ; White, R.M.

  • Author_Institution
    University of California, Berkeley, California
  • Volume
    31
  • fYear
    1985
  • fDate
    1985
  • Firstpage
    133
  • Lastpage
    136
  • Abstract
    A 64-element piezoelectric tactile-sensor array, integrated on a silicon chip, has been fabricated and tested. The sensor array consists of 1µm-thick sputtered ZnO piezoelectric capacitors in an 8 × 8 matrix with each sensing element measuring 70 × 70µm2and spaced with a pitch of 70µm. Each sensor element is connected to an on-chip NMOS buffer-amplifier. The measured piezoelectric coefficient d33in the ZnO films is 14.4 pCN-1. The measured voltage responsivity (at T=300K) is 5.2 mV/gm with a hysteresis-free linear response for loading to 200 gm.
  • Keywords
    Capacitive sensors; Capacitors; MOS devices; Personal communication networks; Piezoelectric films; Semiconductor device measurement; Sensor arrays; Silicon; Testing; Zinc oxide;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Electron Devices Meeting, 1985 International
  • Type

    conf

  • DOI
    10.1109/IEDM.1985.190911
  • Filename
    1485461
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=3556464