Title :
Vacuum integrated circuits
Author :
Greene, R. ; Gray, H. ; Campisi, G.
Author_Institution :
Naval Research Laboratory, Washington, DC
Abstract :
There is a rebirth of interest in vacuum electronics for special purpose signal and data processing, based on specific advantages of the vacuum as a device medium, but also on the applicability of solid state fabrication technology to vacuum device and circuit concepts. Programs in this direction at several laboratories are reviewed. The prospects for vacuum ICs filling special application niches are discussed.
Keywords :
Data processing; Fabrication; Filling; Integrated circuit technology; Iron; Laboratories; Optical scattering; Signal processing; Solid state circuits; Vacuum technology;
Conference_Titel :
Electron Devices Meeting, 1985 International
DOI :
10.1109/IEDM.1985.190922
