DocumentCode
3556475
Title
Vacuum integrated circuits
Author
Greene, R. ; Gray, H. ; Campisi, G.
Author_Institution
Naval Research Laboratory, Washington, DC
Volume
31
fYear
1985
fDate
1985
Firstpage
172
Lastpage
175
Abstract
There is a rebirth of interest in vacuum electronics for special purpose signal and data processing, based on specific advantages of the vacuum as a device medium, but also on the applicability of solid state fabrication technology to vacuum device and circuit concepts. Programs in this direction at several laboratories are reviewed. The prospects for vacuum ICs filling special application niches are discussed.
Keywords
Data processing; Fabrication; Filling; Integrated circuit technology; Iron; Laboratories; Optical scattering; Signal processing; Solid state circuits; Vacuum technology;
fLanguage
English
Publisher
ieee
Conference_Titel
Electron Devices Meeting, 1985 International
Type
conf
DOI
10.1109/IEDM.1985.190922
Filename
1485472
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