Process and device considerations for micron and submicron CMOS technology

CMOS has emerged as the most important technology for VLSI, and soon VLSI, circuits. This paper will address some of the major technical issues and approaches used in designing state-of-the-art CMOS devices. These topics include the formation of the body for each type of device, the electrical isolation between the two types of devices, the active-device design, and latchup prevention techniques.