Title :
1/2-Inch 768(H) × 492(V) pixel CCD image sensor
Author :
Oda, E. ; Orihara, K. ; Kitagawa, T. ; Arai, K. ; Kamata, T. ; Ishihara, Y.
Author_Institution :
NEC Corporation, Kawasaki, Japan
Abstract :
A 1/2-inch format 768(H) × 492(V) pixel interline CCD image sensor has been developed. Unit cell dimension is as small as 8.4(H) × 9.8(V) µm. In order to realize such a high density device, various technologies have been developed, i.e., (1) dual channel horizontal CCD registers, (2) single p-well vertical overflow drain, (3) High-Capacitance p-well structure and (4) Inverted-LOCOS channel isolation process. Experimental results show the effectiveness of the technologies used.
Keywords :
Area measurement; Blanking; Charge coupled devices; Charge transfer; Charge-coupled image sensors; Clocks; Electrodes; Pixel; Registers; Timing;
Conference_Titel :
Electron Devices Meeting, 1985 International
Conference_Location :
Washington, DC, USA
DOI :
10.1109/IEDM.1985.190997
