DocumentCode
3556645
Title
Monolithic integration of Si MOSFETs and GaAs MESFETs
Author
Choi, H.K. ; Turner, G.W. ; Tsaur, B-Y.
Author_Institution
Massachusetts Institute of Technology, Lexington, Massachusetts
Volume
31
fYear
1985
fDate
1985
Firstpage
766
Lastpage
767
Keywords
Epitaxial growth; Etching; Gallium arsenide; MESFETs; MODFET circuits; MOSFETs; Metallization; Monolithic integrated circuits; Optical device fabrication; Substrates;
fLanguage
English
Publisher
ieee
Conference_Titel
Electron Devices Meeting, 1985 International
Type
conf
DOI
10.1109/IEDM.1985.191090
Filename
1485640
Link To Document