Title :
Fabrication techniques for integrated sensor microstructures
Author :
Guckel, H. ; Burns, D.W.
Author_Institution :
University of Wisconsin, Madison, Wisconsin
Keywords :
Capacitive sensors; Etching; Fabrication; Mechanical sensors; Microelectronics; Microstructure; Resistors; Silicon; Thermal resistance; Transducers;
Conference_Titel :
Electron Devices Meeting, 1986 International
DOI :
10.1109/IEDM.1986.191143
