Microfabrication technology for development of chronic neural information transducers

A chronically implantable neural information transducer is being developed for physiological and clinical applications. The technology is based on microfabricated silicon structures which can eventually integrate signal processing circuitry on the same substrate. The micromachined probe structure has been optimized for biocompatibility. Fabrication and design aspects of the probe which determine the ultimate signal to noise ratio of the system have been identified and are being optimized. A sensor and analytical technique for non-destructive assessment of thin film passivation layers has been identified and will be used to develop passivation technology for chronically implantable neural information sensors.