Title :
Micro-diaphragm pressure sensor
Author :
Sugiyama, S. ; Suzuki, T. ; Kawahata, K. ; Shimaoka, K. ; Takigawa, M. ; Igarashi, I. ; Igarashi, I.
Author_Institution :
Toyota Central Research & Development Laboratories, Inc., Aichi, Japan
Abstract :
A micro-diaphragm pressure sensor with silicon nitride diaphragm of 80 µm × 80 µm was fabricated by applying micromachining technique. The main feature is that it is a complete planar type pressure sensor formed by single-side processing solely on the top surface of
Keywords :
Anisotropic magnetoresistance; Biosensors; Etching; Micromachining; Resistors; Sensor arrays; Silicon; Substrates; Temperature distribution; Temperature sensors;
Conference_Titel :
Electron Devices Meeting, 1986 International
DOI :
10.1109/IEDM.1986.191145
