• DocumentCode
    3556741
  • Title

    Session 12 Device technology — Advanced fabrication technology

  • Author

    Peckerar, M. ; Shott, J.

  • Author_Institution
    Naval Research Laboratory
  • fYear
    1986
  • fDate
    7-10 Dec. 1986
  • Firstpage
    291
  • Lastpage
    291
  • Abstract
    Start of the above-titled section of the conference proceedings.
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Electron Devices Meeting, 1986 International
  • Conference_Location
    Los Angeles, CA, USA
  • Type

    conf

  • DOI
    10.1109/IEDM.1986.191172
  • Filename
    1486430
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=3556741