Title :
Session 29 Device technology — Thin dielectrics
Author :
Schaber, H. ; Wong, Simon
Author_Institution :
Siemens
Abstract :
Start of the above-titled section of the conference proceedings.
Conference_Titel :
Electron Devices Meeting, 1986 International
Conference_Location :
Los Angeles, CA, USA
DOI :
10.1109/IEDM.1986.191277
