Title :
Micromachined ZnO on silicon nitride pressure sensor
Author :
Kim, E.S. ; Muller, R.S.
Author_Institution :
University of California, Berkeley, California
Keywords :
Acoustic sensors; Gas detectors; Piezoelectric films; Piezoelectric transducers; Sensor phenomena and characterization; Silicon compounds; Sputter etching; Tensile stress; Testing; Zinc oxide;
Conference_Titel :
Electron Devices Meeting, 1986 International
DOI :
10.1109/IEDM.1986.191319
