• DocumentCode
    3557022
  • Title

    Micro-crystalline hetero-emitter with high injection efficiency for Si HBT

  • Author

    Sasaki, Kimihiro ; Fukazaw, Takeshi ; Furukawa, Seijiro

  • Author_Institution
    Tokyo Institute of Technology, Yokohama, Japan
  • Volume
    33
  • fYear
    1987
  • fDate
    1987
  • Firstpage
    186
  • Lastpage
    189
  • Keywords
    Amorphous materials; Annealing; Bipolar transistors; Chemical vapor deposition; Contact resistance; Fabrication; Heterojunction bipolar transistors; Oxidation; Semiconductor films; Silicon carbide;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Electron Devices Meeting, 1987 International
  • Type

    conf

  • DOI
    10.1109/IEDM.1987.191383
  • Filename
    1487341
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=3557022