Title :
Micro-crystalline hetero-emitter with high injection efficiency for Si HBT
Author :
Sasaki, Kimihiro ; Fukazaw, Takeshi ; Furukawa, Seijiro
Author_Institution :
Tokyo Institute of Technology, Yokohama, Japan
Keywords :
Amorphous materials; Annealing; Bipolar transistors; Chemical vapor deposition; Contact resistance; Fabrication; Heterojunction bipolar transistors; Oxidation; Semiconductor films; Silicon carbide;
Conference_Titel :
Electron Devices Meeting, 1987 International
DOI :
10.1109/IEDM.1987.191383
