Title :
Session 9 Device technology — Interconnect technology
Author :
Heath, Barbara ; Kwong, David
Author_Institution :
Digital Equipment Corporation
Abstract :
Start of the above-titled section of the conference proceedings.
Conference_Titel :
Electron Devices Meeting, 1987 International
Conference_Location :
Washington, DC, USA
DOI :
10.1109/IEDM.1987.191386
