Title :
Fabrication and testing of a micromachined shear sensor
Author :
Schmidt, Martin A. ; Howe, Roger T. ; Senturia, Stephen D. ; Haritonidis, Joseph H.
Author_Institution :
Massachusetts Institute of Technology, Cambridge, MA
Abstract :
A surface micromachined floating-element shear-stress sensor intended for use in turbulence research is described. A package technology has been developed and the sensor has been calibrated in laminar flow. Results of the measurements are in good agreement with an electro-mechanical model of the response.
Keywords :
Electrodes; Extraterrestrial measurements; Fabrication; Laboratories; Mechanical sensors; Packaging; Polyimides; Spatial resolution; Stress measurement; Testing;
Conference_Titel :
Electron Devices Meeting, 1987 International
DOI :
10.1109/IEDM.1987.191410
