DocumentCode
3557093
Title
Effect of channel strain on the electrical characteristics of InGaAs/InAlAs HEMTs
Author
Chan, Y.-J. ; Pavlidis, D. ; Ng, G.I. ; Jaffe, M. ; Singh, J. ; Quillec, M.
Author_Institution
The University of Michigan, Ann Arbor, MI
Volume
33
fYear
1987
fDate
1987
Firstpage
427
Lastpage
430
Abstract
In0.52 Al0.48 As/In0.53+x Ga0.47-x AS HEMTs are studied experimentally and theoretically in order to evaluate the effect of strain introduced in the channel by increased In composition. A tight binding formalism is used in order to model the biaxial compressive strain. The distribution of the charge sheet density in the subbands of the quatum well is evaluated as a function of strain and carrier enhancement is observed primarily in the ground state sub-band. Devices were grown by MBE using the presented design procedure. HEMTs were fabricated using 60% and 65% In composition and the measured intrinsic transconductance is found to increase by 40% (321mS/mm) and 47% (359mS/mm) respectively. Capacitance-voltage and temperature characteristics are presented. First microwave results are also reported.
Keywords
Capacitance-voltage characteristics; Capacitive sensors; Electric variables; HEMTs; Indium compounds; Indium gallium arsenide; Land surface temperature; MODFETs; Stationary state; Transconductance;
fLanguage
English
Publisher
ieee
Conference_Titel
Electron Devices Meeting, 1987 International
Type
conf
DOI
10.1109/IEDM.1987.191449
Filename
1487407
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