DocumentCode
3557120
Title
Session 22 Advanced IC interconnect technology
Author
Ping Ko ; Wong, Simon
Author_Institution
University of California, Berkeley, CA
fYear
1987
fDate
6-9 Dec. 1987
Firstpage
525
Lastpage
525
Abstract
Start of the above-titled section of the conference proceedings.
fLanguage
English
Publisher
ieee
Conference_Titel
Electron Devices Meeting, 1987 International
Conference_Location
Washington, DC, USA
Type
conf
DOI
10.1109/IEDM.1987.191476
Filename
1487434
Link To Document