DocumentCode
3557132
Title
Observation of single electron trapping using scanning tunneling microscopy
Author
Koch, R.H. ; Hamers, R.J.
Author_Institution
IBM Thomas J. Watson Research Center, Yorktown Heights, NY
Volume
33
fYear
1987
fDate
1987
Firstpage
566
Lastpage
569
Keywords
Current measurement; Density measurement; Electron traps; Rough surfaces; Scanning electron microscopy; Silicon; Surface resistance; Surface roughness; Surface topography; Tunneling;
fLanguage
English
Publisher
ieee
Conference_Titel
Electron Devices Meeting, 1987 International
Type
conf
DOI
10.1109/IEDM.1987.191489
Filename
1487447
Link To Document