Title :
Soft error rate of 64K SOI-DRAM
Author :
Gotou, H. ; Arimoto, Y. ; Ozeki, M. ; Imaoka, K.
Author_Institution :
Fujitsu, Ltd., Kanagawa, Japan
Keywords :
Adhesives; Annealing; Error analysis; Fabrication; Grinding machines; Insulation; Random access memory; Substrates; Thickness measurement; Voltage;
Conference_Titel :
Electron Devices Meeting, 1987 International
DOI :
10.1109/IEDM.1987.191576
