DocumentCode
3557222
Title
Fabrication results of a silicon epitaxial lateral overgrowth bipolar transistor without a buried collector
Author
Schubert, P. ; Klaasen, W. ; Siekkinen, J. ; Duey, S. ; Neudeck, G.
Author_Institution
Purdue University, W. Lafayette, IN
Volume
33
fYear
1987
fDate
1987
Firstpage
872
Lastpage
873
Keywords
Bipolar transistors; Dielectric devices; Fabrication; Frequency; Geometry; Isolation technology; Lithography; Parasitic capacitance; Silicon; Substrates;
fLanguage
English
Publisher
ieee
Conference_Titel
Electron Devices Meeting, 1987 International
Type
conf
DOI
10.1109/IEDM.1987.191577
Filename
1487535
Link To Document