• DocumentCode
    3557232
  • Title

    Semiconductor lasers with very high quality etched facets

  • Author

    Behfar-Rad, A. ; Wong, S.S.

  • Author_Institution
    Cornell University, Ithaca, New York
  • Volume
    33
  • fYear
    1987
  • fDate
    1987
  • Firstpage
    895
  • Lastpage
    897
  • Keywords
    Chemical lasers; Etching; Gallium arsenide; Mirrors; Optical buffering; Plasma confinement; Resists; Semiconductor lasers; Threshold current; Vertical cavity surface emitting lasers;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Electron Devices Meeting, 1987 International
  • Type

    conf

  • DOI
    10.1109/IEDM.1987.191586
  • Filename
    1487544
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=3557232