Title :
Semiconductor lasers with very high quality etched facets
Author :
Behfar-Rad, A. ; Wong, S.S.
Author_Institution :
Cornell University, Ithaca, New York
Keywords :
Chemical lasers; Etching; Gallium arsenide; Mirrors; Optical buffering; Plasma confinement; Resists; Semiconductor lasers; Threshold current; Vertical cavity surface emitting lasers;
Conference_Titel :
Electron Devices Meeting, 1987 International
DOI :
10.1109/IEDM.1987.191586
