Numerical optimisation of flow-rate microsensors using circuit simulation tools

Author

Swart, N. ; Nathan, A. ; Shams, M. ; Parameswaran, M.

Author_Institution

Electr. & Comput. Eng., Waterloo Univ., Ont., Canada

fYear

1991

fDate

24-27 June 1991

Firstpage

26

Lastpage

29

Abstract

Numerical simulation results of the steady state thermal behavior in flow-rate microsensors are presented. The results have been obtained using a circuit level CAD (computer-aided design) tool. The various heat transfer mechanisms are suitably reduced into a circuit model by using the linear and nonlinear circuit elements available in SPICE. Good agreement between simulations and measurements has been obtained for realistic values of physical parameters. Both laminar and turbulent gas flow conditions are considered.<>

Keywords

circuit CAD; digital simulation; electric sensing devices; flow measurement; flowmeters; heat transfer; CAD; SPICE; circuit simulation; flow-rate microsensors; heat transfer; laminar gas flow; linear circuit elements; nonlinear circuit elements; numerical optimisation; steady state thermal behavior; turbulent gas flow; Circuit simulation; Computational modeling; Design automation; Fluid flow; Heat transfer; Microsensors; Nonlinear circuits; Numerical simulation; SPICE; Steady-state;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid-State Sensors and Actuators, 1991. Digest of Technical Papers, TRANSDUCERS '91., 1991 International Conference on

Conference_Location

San Francisco, CA, USA

Print_ISBN

0-87942-585-7

Type

conf

DOI

10.1109/SENSOR.1991.148789

Filename

148789