Micro flow sensor and integrated magnetic oxygen sensor using it

Author

Esashi, M.

Author_Institution

Dept. of Precision Eng., Tohoku Univ., Sendai, Japan

fYear

1991

fDate

24-27 June 1991

Firstpage

34

Lastpage

37

Abstract

A thermal micro mass flow sensor was developed. A micro bridge heater was fabricated by micromachining. The sensor has high sensitivity and quick response because of its small thermal capacity and small thermal time constant. Micro bridge differential heaters were used to detect mass flow in a small flow range. An integrated magnetic oxygen sensor was fabricated using the micro thermal flow sensor. The flow sensor and the micro valve will be applied in integrated gas control systems.<>

Keywords

electric sensing devices; flow measurement; flowmeters; integrated circuit technology; oxygen; O/sub 2/; differential heaters; fabrication; gas control; integrated sensor; magnetic sensor; micro bridge heater; micro valve; micromachining; paramagnetic sensor; thermal capacity; thermal micro mass flow sensor; thermal time constant; Etching; Gas detectors; Glass; Magnetic sensors; Oxygen; Silicon compounds; Structural beams; Temperature sensors; Thermal sensors; Thick film sensors;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid-State Sensors and Actuators, 1991. Digest of Technical Papers, TRANSDUCERS '91., 1991 International Conference on

Conference_Location

San Francisco, CA, USA

Print_ISBN

0-87942-585-7

Type

conf

DOI

10.1109/SENSOR.1991.148791

Filename

148791