Combinatorial optimization of transparent conducting oxides (TCOs) for PV

Author

Perkins, J.D. ; Taylor, M.P. ; van HEST, M.F.A.M. ; Teplin, C.W. ; Alleman, J.L. ; Dabney, M.S. ; Gedvilas, L.M. ; Keyes, B.M. ; To, B. ; Readey, D.W. ; Delahoy, A.E. ; Guo, S. ; Ginley, D.S.

Author_Institution

Nat. Renewable Energy Lab., Golden, CO, USA

fYear

2005

fDate

3-7 Jan. 2005

Firstpage

145

Lastpage

147

Abstract

Transparent conducting oxides (TCOs) can serve a variety of important functions in thin film photovoltaics such as transparent electrical contacts, antireflection coatings and chemical barriers. Two areas of particular interest are TCOs that can be deposited at low temperatures and TCOs with high carrier mobilities. We have employed combinatorial high-throughput approaches to investigate both these areas. Conductivities of σ = 2500 Ω^-1-cm^-1 have been obtained for In-Zn-O (IZO) films deposited at 100°C and σ > 5000 Ω^-1-cm^-1 for In-Ti-O (ITiO) and In-Mo-O (IMO) films deposited at 550°C. The highest mobility obtained was 83 cm²/V-sec for ITiO deposited at 550°C.

Keywords

carrier mobility; conductors (electric); electrical conductivity; indium compounds; molybdenum; photovoltaic effects; thin films; titanium; zinc; 100 degC; 2500 S/cm; 550 degC; In-Mo-O films; In-Ti-O films; In-Zn-O films; In₂O₃:Mo; In₂O₃:Ti; In₂O₃:Zn; antireflection coatings; carrier mobility; chemical barriers; combinatorial high-throughput approaches; combinatorial optimization; conductivity; film deposition; thin film photovoltaics; transparent conducting oxides; transparent electrical contacts; Annealing; Chemicals; Coatings; Conductive films; Conductivity; Contacts; Libraries; Optical reflection; Photovoltaic cells; Temperature;

fLanguage

English

Publisher

ieee

Conference_Titel

Photovoltaic Specialists Conference, 2005. Conference Record of the Thirty-first IEEE

ISSN

0160-8371

Print_ISBN

0-7803-8707-4

Type

conf

DOI

10.1109/PVSC.2005.1488090

Filename

1488090