• DocumentCode
    355800
  • Title

    Optimization of the arrangement of the piezoresistors on the elastic elements of the non-traditional form

  • Author

    Dragunov, Valery ; Voroshilov, Vladimir

  • Author_Institution
    Novosibirsk State Tech. Univ., Russia
  • Volume
    2
  • fYear
    2000
  • fDate
    2000
  • Firstpage
    240
  • Abstract
    In the given work the association of sensitivity of an integrated piezotransducer from localization of tenzoresistances on the elastic element was investigated, and the best value coordinates, and angles for the elastic element of the various form are defined
  • Keywords
    piezoresistive devices; resistors; elastic element; integrated piezotransducer; piezoresistor; sensitivity; tenzoresistance; Capacitive sensors; Crystallography; Geometry; Piezoresistive devices; Production; Resistors; Shape; Silicon; Strain measurement; Tensile stress;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Science and Technology, 2000. KORUS 2000. Proceedings. The 4th Korea-Russia International Symposium on
  • Conference_Location
    Ulsan
  • Print_ISBN
    0-7803-6486-4
  • Type

    conf

  • DOI
    10.1109/KORUS.2000.866033
  • Filename
    866033
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=355800