Title :
Optimization of the arrangement of the piezoresistors on the elastic elements of the non-traditional form
Author :
Dragunov, Valery ; Voroshilov, Vladimir
Author_Institution :
Novosibirsk State Tech. Univ., Russia
Abstract :
In the given work the association of sensitivity of an integrated piezotransducer from localization of tenzoresistances on the elastic element was investigated, and the best value coordinates, and angles for the elastic element of the various form are defined
Keywords :
piezoresistive devices; resistors; elastic element; integrated piezotransducer; piezoresistor; sensitivity; tenzoresistance; Capacitive sensors; Crystallography; Geometry; Piezoresistive devices; Production; Resistors; Shape; Silicon; Strain measurement; Tensile stress;
Conference_Titel :
Science and Technology, 2000. KORUS 2000. Proceedings. The 4th Korea-Russia International Symposium on
Conference_Location :
Ulsan
Print_ISBN :
0-7803-6486-4
DOI :
10.1109/KORUS.2000.866033
