Title :
Preprocessing of data from spreading-resistance measurements
Author :
van Linschoten, J. ; Snijder, J. ; Hillen, M.W.
Author_Institution :
Groningen State University, Department of Applied Physics, Groningen, Netherlands
fDate :
4/1/1980 12:00:00 AM
Abstract :
Spreading-resistance measurements often exhibit a lot of noise which can hinder their analysis. A method is presented for automated elimination of strongly deviating values, and smoothing of the resistance curve, leading in a few filter steps to a more accurate determination of the concentration profile. It is shown that the accuracy of the spreading-resistance technique can be increased by combining several profiles of a sample.
Keywords :
doping profiles; electric resistance measurement; electrical conductivity of crystalline semiconductors and insulators; semiconductor technology; correction factors; doping profiles; filtering method; noisy measurement data; resistivity calculation; resistivity profiles; semiconductors; spreading resistance measurements;
Journal_Title :
Solid-State and Electron Devices, IEE Proceedings I
Conference_Location :
4/1/1980 12:00:00 AM
DOI :
10.1049/ip-i-1.1980.0019
