Title :
Pressure-sensitive cuts for surface acoustic waves in /spl alpha/-quartz
Author :
Taziev, Rinat M. ; Kolosovsky, Evgeny A. ; Kozlov, Anatoliy S.
Author_Institution :
Inst. of Semicond. Phys., Acad. of Sci., Novosibirsk, Russia
Abstract :
The influence of external static forces on SAW velocity is computed for the case of circular plates (membranes). The pressure sensitivity of the SAW velocity as a function of /spl alpha/-quartz crystal anisotropy is presented by sensitivity contour mapping for two independent variables: direction of SAW propagation and cut angles of the /spl alpha/-quartz substrate. The theoretical sensitivity values are compared with experimental results for the case of circular plates. Both experimental and theoretical results are in good agreement.<>
Keywords :
quartz; sensitivity; surface acoustic wave resonators; surface acoustic waves; ultrasonic velocity; /spl alpha/-quartz; SAW propagation direction; SAW resonator structure; SAW velocity; SiO/sub 2/; circular plates; crystal anisotropy; external static forces; membranes; pressure sensitivity; pressure-sensitive cuts; sensitivity contour mapping; substrate cut angle; surface acoustic waves; Acoustic waves; Anisotropic magnetoresistance; Biomembranes; Equations; Solids; Stress; Surface acoustic wave devices; Surface acoustic waves; Surface waves; Temperature sensors;
Journal_Title :
Ultrasonics, Ferroelectrics, and Frequency Control, IEEE Transactions on
