Title :
Liquid Operation of Silicon Microcantilever Heaters
Author :
Lee, Jungchul ; King, William P.
Author_Institution :
Dept. of Mech. Sci. & Eng., Univ. of Illinois at Urbana-Champaign, Urbana, IL
Abstract :
This letter reports characterization and calibration of silicon microcantilever heaters for operation in liquid environments. Cantilever thermomechanical noise spectra were measured in air and in water using a commercial atomic force microscope. Cantilever electrical characteristics were measured in air and water. Laser Raman thermometry measured cantilever temperature in air and water, allowing temperature calibration through comparison with electrical characteristics. Cantilever thermal conductance in water was 136-610 W/K, depending upon the cantilever type. The cantilever electrical resistance is an accurate measure of cantilever temperature in both air and water.
Keywords :
atomic force microscopy; cantilevers; electric resistance measurement; heating elements; measurement by laser beam; micromechanical devices; silicon; temperature measurement; thermal conductivity; Si; atomic force microscope; electrical characteristics; electrical resistance; laser Raman thermometry; liquid operation; silicon microcantilever heater; temperature measurement; thermal conductance; thermomechanical noise spectra; Atomic force microscopy; Atomic measurements; Calibration; Electric variables; Electric variables measurement; Electrical resistance measurement; Force measurement; Silicon; Temperature measurement; Water; Laser Raman thermometry; liquid operation; microcantilever; microcantilever heater; resistive thermometer;
Journal_Title :
Sensors Journal, IEEE
DOI :
10.1109/JSEN.2008.2005159
