DocumentCode :
3559555
Title :
Fabrication and Characterization of a Polymeric Microcantilever With an Encapsulated Hotwire CVD Polysilicon Piezoresistor
Author :
Kale, Nitin S. ; Nag, Sudip ; Pinto, Richard ; Rao, V. Ramgopal
Author_Institution :
Dept. of Electr. Eng., Indian Inst. of Technol. Bombay, Mumbai, India
Volume :
18
Issue :
1
fYear :
2009
Firstpage :
79
Lastpage :
87
Abstract :
We demonstrate a novel photoplastic nanoelectromechanical device that includes an encapsulated polysilicon piezoresistor. The temperature limitation that typically prevents deposition of polysilicon films on polymers was overcome by employing a hotwire CVD process. In this paper, we report the use of this process to fabricate and characterize a novel polymeric cantilever with an embedded piezoresistor. This device exploits the low Young´s modulus of organic polymers and the high gauge factor of polysilicon. The fabricated device fits into the cantilever holder of an atomic force microscope (AFM) and can be used in conjunction with the AFM´s liquid cell for detecting the adsorption of biochemicals. It enables differential measurement while preventing biochemicals from interfering with measurements using the piezoresistor. The mechanical and electromechanical characterization of the device is also reported in this paper. [2008-0108]
Keywords :
CVD coatings; adsorption; atomic force microscopy; cantilevers; chemical sensors; elemental semiconductors; microsensors; piezoresistive devices; polymers; resistors; semiconductor thin films; silicon; AFM; Young´s modulus; adsorption; atomic force microscope; biochemical; embedded piezoresistor; encapsulated hotwire CVD; liquid cell; microcantilever; organic polymers; polysilicon piezoresistor; Affinity cantilevers; bio-microelectromechanical system (bio-MEMS); hotwire CVD (HWCVD); piezoresistive sensing; polymeric cantilevers; surface stress;
fLanguage :
English
Journal_Title :
Microelectromechanical Systems, Journal of
Publisher :
ieee
Conference_Location :
12/12/2008 12:00:00 AM
ISSN :
1057-7157
Type :
jour
DOI :
10.1109/JMEMS.2008.2008577
Filename :
4711134
Link To Document :
بازگشت