Micro Hysteresis Sensor for Wafer Level Testing of Magnetic Films

To guarantee a successful fabrication of magnetic micro devices, attaining the desired properties of magnetic thin-films is a precondition. This is particularly true for anisotropic magnetic films. This paper presents the development and fabrication of a micro hysteresis sensor chip consisting of two independent sensors oriented perpendicular to each other. Such an approach allows measuring the properties of anisotropic magnetic thin-films along the two desired axes. The paper describes design, fabrication, and evaluation of the micro hysteresis sensor.