DocumentCode
3560154
Title
Film Composition, Substrate Temperature, and Thickness Dependence of Sm(Co, Cu) 
/Ru Thin Films With Perpendicular Anisotropy
Author
Liu, Xiaoqi ; Zhao, Haibao ; Kubota, Yukiko ; Wang, Jian-Ping
Author_Institution
Dept. of Electr. & Comput. Eng., Univ. of Minnesota, Minneapolis, MN
Volume
44
Issue
11
fYear
2008
Firstpage
3550
Lastpage
3553
Abstract
SmCo5 thin film has been considered as one of several promising candidates for extremely high areal density recording media because of the demand of media with extremely small but thermally stable grains. In this paper, Sm(Co, Cu)5 films with perpendicular anisotropy were successfully fabricated by dc sputtering with relatively small grain size. Zero in-plane coercivity and 11 kOe out-of-plane coercivity were obtained on Ta(3 nm)/Sm-Co-Cu(10 nm)/Ru(20 nm)/Ta(4.2 nm) thin films. Effects of deposition temperature, film composition, and film thickness on the magnetic properties of SmCoCu films were investigated and reported.
Keywords
cobalt alloys; coercive force; copper alloys; grain size; magnetic hysteresis; magnetic thin films; perpendicular magnetic anisotropy; perpendicular magnetic recording; ruthenium; samarium alloys; sputter deposition; tantalum; Sm(CoCu)5-Ru; Ta-SmCoCu-Ru-Ta; dc magnetron sputtering system; deposition temperature; glass substrate temperature; grain size; high areal density recording media; magnetic hysteresis; magnetic properties; perpendicular magnetic anisotropy; size 10 nm; size 20 nm; size 3 nm; size 4.2 nm; thin film composition; zero in-plane coercivity; Energy assisted magnetic recording; Ru underlayer; Sm(Co, Cu)$_{5}$ $_{5}$
fLanguage
English
Journal_Title
Magnetics, IEEE Transactions on
Publisher
ieee
ISSN
0018-9464
Type
jour
DOI
10.1109/TMAG.2008.2001611
Filename
4717495
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