Enhancement of Resistive Switching Characteristics in $\hbox {Al}_{2}\hbox {O}_{3}$ -Based RRAM With Embedded Ruthenium Nanocrystals

Resistive switching behaviors of Al₂O₃-based memory devices with and without ruthenium nanocrystals (RuNCs) fabricated by atomic layer deposition are investigated for nonvolatile-memory applications. Large resistance ratios (>; 10⁵) of high- to low-resistance states were observed with nanocrystals contribution. Moreover, improvements of stability device yield and retention performance were also achieved by embedding RuNCs. Therefore, the Al₂O₃-based resistive memory device composed of embedded nanocrystals is a possible solution for future integrated standalone storage class memory processes.