Title :
Secondary signal processing systems for SiGe-based thermal sensors
Author :
Druzhinin, Anatoly ; Ostrovskii, Ihor ; Kogut, Iurii
Abstract :
Thermal performances of Si-Ge whiskers were measured in temperature range of 4, 2-550K. On their basis sensors for simultaneous measuring of absolute temperature and temperature difference in the range of 20-120K as well as 350-500K have been designed. High value of figure of merit indicates in good stability of sensor operation. Inertia of the sensor does not exceed 60 msec. To improve output performances of thermal sensors secondary signal processing systems were designed.
Keywords :
Ge-Si alloys; semiconductor devices; semiconductor materials; signal processing; temperature sensors; Si-Ge whiskers; SiGe-based thermal sensors; absolute temperature; secondary signal processing systems; temperature 4.2 K to 550 K; temperature difference; thermal performances; Seebeck coefficient; Whisker; resistance; signal processing; thermal sensor;
Conference_Titel :
Modern Problems of Radio Engineering, Telecommunications and Computer Science, 2008 Proceedings of International Conference on
Print_ISBN :
978-966-553-678-9