• DocumentCode
    3561859
  • Title

    A MEMS controlled cavity optomechanical sensing system

  • Author

    Miao, Houxun ; Srinivasan, Kartik ; Aksyuk, Vladimir

  • Author_Institution
    Center for Nanoscale Sci. & Technol., Nat. Inst. of Stand. & Technol., Gaithersburg, MD, USA
  • fYear
    2012
  • Firstpage
    1
  • Lastpage
    2
  • Abstract
    We report a fully-integrated MEMS sensing platform enabled by cavity optomechanics. We demonstrate 4.6 fm/Hz1/2 displacement sensitivity for sub-μW input power, electrostatically-tunable readout gain, and feedback damping of mechanical response by a factor of >;1000.
  • Keywords
    damping; displacement measurement; integrated optics; micro-optomechanical devices; microcavities; microsensors; optical control; optical feedback; optical sensors; optical tuning; MEMS controlled cavity optomechanical sensing system; displacement sensitivity; electrostatically-tunable readout gain; feedback damping; fully-integrated MEMS sensing platform; mechanical response; Cavity resonators; Noise; Optical feedback; Optical resonators; Optical sensors; Optical variables measurement;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Lasers and Electro-Optics (CLEO), 2012 Conference on
  • Print_ISBN
    978-1-4673-1839-6
  • Type

    conf

  • Filename
    6325545
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=3561859