High-resolution Cardo polymer dielectric "VPA-series"

Author

Mizuuchi, Kazuhiko ; Kawasato, Hironobu ; Takeuchi, Masahiko ; Inaba, Sinji ; Teramoto, Takero

Author_Institution

Electron. Mater. R&D Labs., Nippon Steel Chem. Co. Ltd., Chiba, Japan

fYear

2002

fDate

6/24/1905 12:00:00 AM

Firstpage

924

Lastpage

930

Abstract

Nippon Steel Chemical Co., Ltd. has developed a "Cardo" structure polymer based dielectric VPA-series. "Cardo" structure is characterized as bulky substituents attached to the sp3 carbon in polymer backbone. We achieved excellent heat resistance as an acrylic polymer by adopting fluorene as bulky substituent. We have designed a photoimageable dielectric using this polymer. This dielectric has excellent resolution (via-hole opening aspect ratio >1 for a wide thickness range) and high reliability together with heat resistance. This paper introduces characteristics of the polymer itself and featured as dielectric for both printed wiring board (PWB) and wafer level package (WLP) applications. Varnish type and dry film resist (DFR) types are available.

Keywords

circuit reliability; dielectric thin films; image resolution; integrated circuit packaging; photolithography; polymer films; printed circuits; Cardo structure polymer based dielectric; VPA-series Cardo polymer dielectric; acrylic polymer; bulky substituent attachment; dielectric resolution; dry film resist type dielectric; fluorene bulky substituent; heat resistance; photoimageable dielectric; polymer backbone; polymer characteristics; printed wiring board dielectric; reliability; sp3 carbon; thickness range; varnish type dielectric; via-hole opening aspect ratio; wafer level package dielectric; Chemicals; Dielectrics; Packaging; Polymers; Resistance heating; Resists; Spine; Steel; Wafer scale integration; Wiring;

fLanguage

English

Publisher

ieee

Conference_Titel

Electronic Components and Technology Conference, 2002. Proceedings. 52nd

ISSN

0569-5503

Print_ISBN

0-7803-7430-4

Type

conf

DOI

10.1109/ECTC.2002.1008211

Filename

1008211