Design and analysis of diversified micro-cantilever structure for sensor applications

Author

Patel, Piyush N. ; Yadav, Rahul ; Adhvaryu, Meghayu

Author_Institution

Electron. Eng. Dept., Sardar Vallabhbhai Nat. Inst. of Technol., Surat, India

fYear

2014

Firstpage

1

Lastpage

5

Abstract

The paper presents a novel diversity design of a micro-machined cantilever structure with micro-bending measurements techniques using simple optical IR emitter/receiver array and point of contact approach. The proposed novel design compared to earlier simple rectangular micro-cantilever offers more sensitive micro displacement and ease of bending detection. A simplified calibration technique has been presented to provide a window for resolution and sensitivity analysis of micro-cantilever sensor. The designed sensor is a two level cantilever arrangement having circular and rectangular perforations at desired location along the cantilever so as to improve the detection capability of target parameters.

Keywords

bending; calibration; cantilevers; mechanical variables measurement; micromachining; microsensors; optical receivers; optical sensors; bending detection; circular perforation; diversified microcantilever sensor structure; diversified micromachined cantilever structure; microbending measurement technique; microdisplacement; point of contact approach; rectangular microcantilever; rectangular perforation; sensitivity analysis; simple optical IR emitter-receiver array; simplified calibration technique; two level cantilever arrangement; Arrays; Calibration; Metals; Monitoring; Sensors; Stress; Structural beams;

fLanguage

English

Publisher

ieee

Conference_Titel

Emerging Technology Trends in Electronics, Communication and Networking (ET2ECN), 2014 2nd International Conference on

Print_ISBN

978-1-4799-6985-2

Type

conf

DOI

10.1109/ET2ECN.2014.7044966

Filename

7044966