DocumentCode :
3564553
Title :
Fabrication and characteristics of the suppressed sidewall injection magnetotransistor using a CMOS process
Author :
Song, Youn-Gui ; Ryu, Ji-Goo ; Choi, Young-Shig ; Kim, Nam-Ho
Author_Institution :
Dept. of Electron. Eng., Pukyong Nat. Nat. Univ., South Korea
Volume :
1
fYear :
2005
Firstpage :
617
Abstract :
We report the implementation of a novel suppressed sidewall injection magnetotransistor. The novel device overcomes the restriction of the standard CMOS technology and achieves high linearity. The fabricated device is designed, based on the Hynix 0.6 μm standard CMOS technology and is experimentally verified. Experimental results show that the change of the collector current is extremely linear as a function of the magnetic induction at IB=500 μA, VCE=2 V and VSE=5 V. The relative sensitivity is up to 120%/T. The nonlinearity of the fabricated device is measured about 1.4%.
Keywords :
bipolar transistors; magnetic sensors; microsensors; semiconductor technology; sensitivity; 0.6 micron; 2 V; 5 V; 500 muA; CMOS process; collector current; magnetic field sensor; magnetic induction; relative sensitivity; suppressed sidewall injection magnetotransistor; Bipolar integrated circuits; CMOS process; CMOS technology; Doping; Fabrication; Hall effect; Linearity; MOSFETs; Magnetic field measurement; Magnetic sensors;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05. The 13th International Conference on
Print_ISBN :
0-7803-8994-8
Type :
conf
DOI :
10.1109/SENSOR.2005.1496493
Filename :
1496493
Link To Document :
بازگشت