THz on-wafer calibration using offset-shorts and known through as standards

We present a novel on-wafer calibration technique using well-defined standards that can be an alternative to widely used multiline-TRL (thru-reflect-line) calibration in millimeter and submillimeter waves. Our method is specifically useful in measurement setups with fixed probes since TRL-type calibration typically requires different physical separation between measurement probes. As on-wafer standards, offset shorts with different electrical delay lengths and a simple through connection are used. Experimental validation of this calibration method is provided in G-Band (140-220 GHz) via measurement of a Beatty standard (mismatched thru) using non-contact probes.