• DocumentCode
    3565046
  • Title

    Enhanced time delay integration imaging using embedded CCD in CMOS technology

  • Author

    De Moor, Piet ; Robbelein, Jo ; Haspeslagh, Luc ; Boulenc, Pierre ; Ercan, Alper ; Minoglou, Kyriaki ; Lauwers, Anne ; De Munck, Koen ; Rosmeulen, Maarten

  • Author_Institution
    imec, Leuven, Belgium
  • fYear
    2014
  • Abstract
    This paper presents a new imager platform developed at imec enabling the monolithic integration of 130 nm CMOS image sensors (CMOS/CIS) with charge coupled devices (CCD). The process module was successfully developed and the potential of this embedded CCD in CMOS (eCCD) was demonstrated with the fabrication of a time delay integration (TDI) imager.
  • Keywords
    CCD image sensors; CMOS image sensors; elemental semiconductors; silicon; CMOS technology; Si; charge coupled devices; embedded CCD; enhanced time delay integration imaging; monolithic integration; size 130 nm; Arrays; CMOS integrated circuits; CMOS technology; Charge coupled devices; Charge transfer; Imaging; Logic gates;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Electron Devices Meeting (IEDM), 2014 IEEE International
  • Type

    conf

  • DOI
    10.1109/IEDM.2014.7046984
  • Filename
    7046984
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=3565046