Title :
Enhanced time delay integration imaging using embedded CCD in CMOS technology
Author :
De Moor, Piet ; Robbelein, Jo ; Haspeslagh, Luc ; Boulenc, Pierre ; Ercan, Alper ; Minoglou, Kyriaki ; Lauwers, Anne ; De Munck, Koen ; Rosmeulen, Maarten
Author_Institution :
imec, Leuven, Belgium
Abstract :
This paper presents a new imager platform developed at imec enabling the monolithic integration of 130 nm CMOS image sensors (CMOS/CIS) with charge coupled devices (CCD). The process module was successfully developed and the potential of this embedded CCD in CMOS (eCCD) was demonstrated with the fabrication of a time delay integration (TDI) imager.
Keywords :
CCD image sensors; CMOS image sensors; elemental semiconductors; silicon; CMOS technology; Si; charge coupled devices; embedded CCD; enhanced time delay integration imaging; monolithic integration; size 130 nm; Arrays; CMOS integrated circuits; CMOS technology; Charge coupled devices; Charge transfer; Imaging; Logic gates;
Conference_Titel :
Electron Devices Meeting (IEDM), 2014 IEEE International
DOI :
10.1109/IEDM.2014.7046984
