Title :
Lensless latching-type fiber switches using silicon micromachined actuators
Author :
Hoffmann, M. ; Kopka, P. ; Voges, E.
Author_Institution :
Lehrstuhl fur Hochfrequenztech., Dortmund Univ., Germany
Abstract :
Thermally driven latching-type moving-fiber switches without lenses are presented. Silicon micromachined 1/spl times/2, 1/spl times/4 and arrays of 1/spl times/2 switches with high reliability show insertion losses below 1 dB and below /spl sim/60 dB crosstalk.
Keywords :
micro-optics; microactuators; micromachining; optical bistability; optical communication equipment; optical switches; silicon; Si; U-shaped cantilevers; anisotropic etching; high reliability; lensless latching-type fiber switches; low crosstalk; low insertion losses; silicon micromachined actuators; switch arrays; thermally driven moving-fiber switches; Actuators; Anisotropic magnetoresistance; Clamps; Etching; Micromachining; Optical device fabrication; Optical sensors; Optical switches; Silicon; Temperature sensors;
Conference_Titel :
Optical Fiber Communication Conference, 2000
Conference_Location :
Baltimore, MD, USA
Print_ISBN :
1-55752-630-3
DOI :
10.1109/OFC.2000.868580
