Title :
Hybrid CMOS/BEOL-NEMS technology for ultra-low-power IC applications
Author :
Nuo Xu ; Sun, Jeff ; I-Ru Chen ; Hutin, Louis ; Yenhao Chen ; Fujiki, Jun ; Chuang Qian ; Tsu-Jae King Liu
Author_Institution :
Dept. of Electr. Eng. & Comput. Sci., Univ. of California, Berkeley, Berkeley, CA, USA
Abstract :
Three-dimensional (3-D) nano-electro-mechanical (NEM) switches (relays) are proposed to reduce the die area and power consumption of digital logic and memory circuits.
Keywords :
CMOS logic circuits; CMOS memory circuits; logic design; low-power electronics; nanoelectromechanical devices; power consumption; relays; three-dimensional integrated circuits; 3D nanoelectromechanical switches; NEM switches; die area; digital logic circuits; hybrid CMOS-BEOL-NEMS technology; memory circuits; power consumption; relays; ultra-low-power IC applications; CMOS integrated circuits; Contacts; Electrodes; Metals; Nanoelectromechanical systems; Relays; Switches;
Conference_Titel :
Electron Devices Meeting (IEDM), 2014 IEEE International
DOI :
10.1109/IEDM.2014.7047130
