Title :
Transmission characteristics of a polymer hollow waveguide fabricated by excimer laser direct writing
Author :
Ming Chang Shih ; Syuan An Lu ; Jei Tze Luo ; Ching Chuan Hsiao ; Shih Wei Fang
Author_Institution :
Dept. of Electr. Eng., Nat. Univ. of Kaohsiung, Kaohsiung, Taiwan
Abstract :
We demonstrate the fabrication of the polymer hollow waveguide on a Si substrate by excimer laser direct writing and its characteristics of optical transmission. A hollow waveguide with transmission loss of 0.019 dB/ μm had been achieved at wavelength of 1.55 μm. In addition, the effect of coating material to the characteristics of the transmission of the polymer hollow waveguides was presented.
Keywords :
antireflection coatings; excimer lasers; light transmission; optical polymers; optical waveguides; Si; Si substrate; coating material; excimer laser direct writing; optical transmission; polymer hollow waveguide; transmission loss; wavelength 1.55 mum; Gold; Hollow waveguides; Laser beams; Optical waveguides; Polymer films; Polymers; Waveguide lasers;
Conference_Titel :
Microsystems, Packaging, Assembly and Circuits Technology Conference (IMPACT), 2014 9th International
DOI :
10.1109/IMPACT.2014.7048414
