Title :
CMOS compatible micromachined resonators
Author :
Moore, D.F. ; Lutwyche, M.I. ; Hoole, A.C.F.
Author_Institution :
Dept. of Eng., Cambridge Univ., UK
fDate :
12/2/1993 12:00:00 AM
Abstract :
This paper outlines the present status and future prospects for micromachining silicon. Suspended microstructures can be deflected electrostatically to open and close tunnel gaps. Possible applications of micromechanical structures include resonators, accelerometers, sensors and integrated scanning probe microscopes
Keywords :
CMOS integrated circuits; accelerometers; electric sensing devices; integrated circuit technology; micromechanical devices; resonators; CMOS compatible micromachined resonators; Si micromachining; accelerometers; integrated scanning probe microscopes; micromechanical structures; microstructures; semiconductor; sensors;
Conference_Titel :
Measurement Using Resonant Sensing, IEE Colloquium on
