DocumentCode
3567305
Title
CMOS compatible micromachined resonators
Author
Moore, D.F. ; Lutwyche, M.I. ; Hoole, A.C.F.
Author_Institution
Dept. of Eng., Cambridge Univ., UK
fYear
1993
fDate
12/2/1993 12:00:00 AM
Firstpage
42430
Lastpage
42432
Abstract
This paper outlines the present status and future prospects for micromachining silicon. Suspended microstructures can be deflected electrostatically to open and close tunnel gaps. Possible applications of micromechanical structures include resonators, accelerometers, sensors and integrated scanning probe microscopes
Keywords
CMOS integrated circuits; accelerometers; electric sensing devices; integrated circuit technology; micromechanical devices; resonators; CMOS compatible micromachined resonators; Si micromachining; accelerometers; integrated scanning probe microscopes; micromechanical structures; microstructures; semiconductor; sensors;
fLanguage
English
Publisher
iet
Conference_Titel
Measurement Using Resonant Sensing, IEE Colloquium on
Type
conf
Filename
289060
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