Resonant pressure sensors

Resonant sensors tend to be more complex in construction and more complicated to use. In the past they have been reserved for certain critical applications which exploit their advantages of high accuracy and long term stability. Nowadays complexity can be obtained cheaply in microcircuits and silicon micromechanics provides a technology which can provide integral containment using a material which is free from relaxation effects. This can be illustrated in the silicon resonant sensor now coming into production at Druck. Using this as an example the author explores the question of whether resonant sensing techniques are likely to be used in large volume applications