Impact factors for BTI lifetime predictions

For accurate Bias Temperature (BTI) lifetime assessments a lot of aspects have to be considered correctly. Detailed requirement profiles, proper designed test-structures, accurate measurement techniques, correct consideration of recovery, and a deep understanding of circuit functions are the most important impact factors for a safe and accurate reliability assurance. This review-paper will address these issues for BTI lifetime predictions. It will discuss both, hazards like adulterant influences of measurement delay or parasitic Plasma Induced Damage (PID) of test-structures as well as opportunities like the s-curve behavior of AC-stress. Finally, some simple guidelines are set up.