Title :
Mechatronic design of RF MEMS switches for communication applications
Author :
Lai, Yeong-Lin ; Wen, Yi-De
Author_Institution :
Dept. of Mechatronics Eng., Nat. Changhua Univ. of Educ., Taiwan
Abstract :
In this paper, we present mechatronic design of RF microelectromechanical system (MEMS) switches. The design is conducted by both the mechanical and electromagnetic schemes on the basis of the finite element method and the full-wave electromagnetic simulation. The relationship among the microelectromechanical characteristics, such as effective stiffness constant, displacement, insertion loss, return loss, and isolation, and switch structures are investigated. The comprehensive mechatronic study of the RF MEMS switches provides a systematic design methodology for RFIC applications.
Keywords :
finite element analysis; mechatronics; microswitches; microwave switches; telecommunication equipment; Ansoft HFSS simulator; RF MEMS switches; RF microelectromechanical system switches; RFIC applications; communication applications; finite element method; full wave electromagnetic simulation; mechatronic design; microelectromechanical characteristics; Bridge circuits; Communication switching; Coplanar waveguides; Design methodology; Insertion loss; Mechatronics; Power transmission lines; Radio frequency; Radiofrequency microelectromechanical systems; Switches;
Conference_Titel :
Circuits and Systems, 2004. MWSCAS '04. The 2004 47th Midwest Symposium on
Print_ISBN :
0-7803-8346-X
DOI :
10.1109/MWSCAS.2004.1354003
